Development of sputtering conditions for PZT micro actuator with high piezoelectric property by Au-Pt buffer layer

Abstract

We developed a medical device to measure blood glucose levels automatically. This device is consisting of a micropump of PZT (Lead Zirconate Titanate) actuator to support during extraction of blood and administration of insulin. Thus, the micro-pump should be miniaturized because it needs to be mounted on the device, so that the device is not too big to be carried. However, a decreasing of piezoelectricity becomes a problem when volume of thinned PZT is reduced. Thus, we intended to create a PZT film which shows high piezoelectricity. In this study, it has been reported that the piezoelectricity is much more improve when PZT(111) and PZT(110) stagger evenly in thin films.