{"title":"SH-SAW transducer analysis on single crystal KNbO/sub 3/ for liquid sensors","authors":"T. Pollard, T. Kenny, P. Cunha","doi":"10.1109/FREQ.2004.1418487","DOIUrl":null,"url":null,"abstract":"A BEM numerical analysis of IDT structures on Euler angles (0/spl deg/, 90/spl deg/, 0/spl deg/) KNbO/sub 3/ has been performed. The analysis considered IDT excitation of both the SH-SAW and SH-BAW modes. The results were targeted at addressing specific issues relevant to liquid sensor applications, such as power partitioning between the SH-SAW and SH-BAW, and SH-BAW power radiation direction into the substrate. The designs with metalized regions outside the IDT seem most promising for liquid sensing applications. Second and third higher order frequency responses for a 5 finger IDT structure showed that 94% and 80%, respectively, of the total input power is converted to the SH-SAW. This result indicates the potential for high frequency applications or sensing platforms that exhibit higher sensitivity at higher operating frequencies. A more rigorous analysis using a combined FEM/BEM tool was also performed, proving there is no need to consider mass loading effects in the analysis of practical IDT structures on the KNbO/sub 3/ propagation direction.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2004.1418487","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A BEM numerical analysis of IDT structures on Euler angles (0/spl deg/, 90/spl deg/, 0/spl deg/) KNbO/sub 3/ has been performed. The analysis considered IDT excitation of both the SH-SAW and SH-BAW modes. The results were targeted at addressing specific issues relevant to liquid sensor applications, such as power partitioning between the SH-SAW and SH-BAW, and SH-BAW power radiation direction into the substrate. The designs with metalized regions outside the IDT seem most promising for liquid sensing applications. Second and third higher order frequency responses for a 5 finger IDT structure showed that 94% and 80%, respectively, of the total input power is converted to the SH-SAW. This result indicates the potential for high frequency applications or sensing platforms that exhibit higher sensitivity at higher operating frequencies. A more rigorous analysis using a combined FEM/BEM tool was also performed, proving there is no need to consider mass loading effects in the analysis of practical IDT structures on the KNbO/sub 3/ propagation direction.