SH-SAW transducer analysis on single crystal KNbO/sub 3/ for liquid sensors

T. Pollard, T. Kenny, P. Cunha
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引用次数: 0

Abstract

A BEM numerical analysis of IDT structures on Euler angles (0/spl deg/, 90/spl deg/, 0/spl deg/) KNbO/sub 3/ has been performed. The analysis considered IDT excitation of both the SH-SAW and SH-BAW modes. The results were targeted at addressing specific issues relevant to liquid sensor applications, such as power partitioning between the SH-SAW and SH-BAW, and SH-BAW power radiation direction into the substrate. The designs with metalized regions outside the IDT seem most promising for liquid sensing applications. Second and third higher order frequency responses for a 5 finger IDT structure showed that 94% and 80%, respectively, of the total input power is converted to the SH-SAW. This result indicates the potential for high frequency applications or sensing platforms that exhibit higher sensitivity at higher operating frequencies. A more rigorous analysis using a combined FEM/BEM tool was also performed, proving there is no need to consider mass loading effects in the analysis of practical IDT structures on the KNbO/sub 3/ propagation direction.
液体传感器单晶KNbO/sub 3/ SH-SAW换能器分析
本文对欧拉角(0/spl°/,90/spl°/,0/spl°/)KNbO/ sub3 /下的IDT结构进行了边界元法数值分析。分析同时考虑了SH-SAW和SH-BAW两种模式的IDT激励。研究结果旨在解决与液体传感器应用相关的具体问题,例如SH-SAW和SH-BAW之间的功率分配,以及SH-BAW功率辐射到基板的方向。在IDT外具有金属化区域的设计似乎最有希望用于液体传感应用。五指IDT结构的二阶和三阶频率响应表明,总输入功率的94%和80%分别转换为SH-SAW。这一结果表明了高频应用或在更高工作频率下表现出更高灵敏度的传感平台的潜力。采用FEM/BEM组合工具进行了更严格的分析,证明在分析实际IDT结构在KNbO/sub - 3/传播方向时无需考虑质量加载影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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