Magnetometer based on a quartz MEMS resonator with two DETFs and a stack of magnetic materials

Abstract

This paper presents a resonating quartz MEMS magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials and the differential measurement of the resonance frequencies of two DETFs. It is targeted for applications such as magneto-inertial navigation. This sensor was fabricated using a wet HF/NH4F etching process and its working principle was proven correct with a magnetic sensitivity of 770 Hz/T.