A. S. Surzev, S. S. Shmakov, A. S. Akreslina, L. Orlikov
{"title":"Fabrication Technology of Optical Waveguides on Glasses","authors":"A. S. Surzev, S. S. Shmakov, A. S. Akreslina, L. Orlikov","doi":"10.1109/APEIE.2000.913081","DOIUrl":null,"url":null,"abstract":"Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals is considered. Waveguide is received by formation the film of lead oxide on standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure.","PeriodicalId":131657,"journal":{"name":"2007 Siberian Conference on Control and Communications","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 Siberian Conference on Control and Communications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/APEIE.2000.913081","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals is considered. Waveguide is received by formation the film of lead oxide on standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure.