Effects of sulfur concentration on structural, optical and electrical properties of Tin Oxide thin films deposited by spray pyrolysis technique

A. El hat, M. Rouchdi, A. Hadri, C. Nassiri, F. Z. Chafi, B. Fares, L. Laânab, N. Hassanain, H. Labrim, A. Mzerd
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引用次数: 3

Abstract

Thin films of Tin oxide doped with deferent concentration of Sulfur were prepared on glass substrates at 400 °C by spray pyrolysis technique. The thin films were characterized to study their physical properties. Effects of Sulfur concentration on structural, optical and electrical properties of transparent Tin Oxide thin films were investigated in the Sulfur content range (0–10) at%. It was observed from X-ray diffraction patterns (XRD) that the films have a polycrystalline structure and the intensity of the peaks depends on the doping content. No diffraction peak related to dopants in XRD patterns along with a shift in peaks angles to SnO2 proved that S ions were doped into SnO2 thin films and the size of the grains has been changed from 3.7 to 4.1 nm. The optical gap of Sn1−xSxO2 thin films was determined to be about 2.58 to 3.63 eV. From the Hall Effect measurements, the minimum resistivity 6.34×10−2 (Ω.cm) was obtained from S-doped SnO2 (5 at. %).
硫浓度对喷雾热解法制备氧化锡薄膜结构、光学和电学性能的影响
在400℃的高温下,采用喷雾热解技术在玻璃衬底上制备了掺杂不同浓度硫的氧化锡薄膜。对薄膜进行表征,研究其物理性质。研究了硫含量在0 ~ 10 %范围内对透明氧化锡薄膜结构、光学和电学性能的影响。从x射线衍射图(XRD)观察到薄膜具有多晶结构,峰的强度与掺杂含量有关。XRD谱图中没有掺杂物相关的衍射峰,且峰角向SnO2方向偏移,证明S离子被掺杂到SnO2薄膜中,晶粒尺寸由3.7 nm变为4.1 nm。Sn1−xSxO2薄膜的光隙约为2.58 ~ 3.63 eV。通过霍尔效应测量,得到了s掺杂SnO2 (5 at)的最小电阻率6.34×10−2 (Ω.cm)。%)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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