Accurate On-Wafer Measurement Technique for E-Band MHMIC Communication Systems

Abstract

The article has proposed a comprehensive analysis of on-wafer millimeter-wave measurements and addressed the challenges of calibration, measurements, and circuit characterization of E-band (60 to 90 GHz) circuits implemented on a thin ceramic substrate. The used thin ceramic substrate is suitable for miniaturized hybrid microwave integrated circuit fabrication at mm-wave frequencies. The proposed method is validated on a directional coupler, and a coupled-line bandpass filter in this frequency band. Simulation and experimental results are in great agreement at such high frequencies.