Fabrication of Ultrasmall Silicon Waveguide Lenses Designed by Wavefront-Matching Method

Abstract

We design and fabricate ultrasmall silicon waveguide lenses designed by a wavefront-matching (WFM) method by a standard CMOS process. It is experimentally demonstrated that a low-loss several micron free-space light propagation is possible by using the waveguide lens designed by the WFM method.