On the metrology and analysis of MSF error

Abstract

The aim of our research was to study middle spatial frequency errors (MSFE) on optical surfaces. We investigate the surfaces after manufacturing processes to find out the main affecting factors and to choose the proper processing parameters to minimize the size of the errors. To find an appropriate parameter window we have to be able not only to define the factors, which lead to MSFE, but also to analyze the change of the error after next following production steps.