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Stress induced leakage current dependence on oxide thickness, technology and stress level

27th European Solid-State Device Research Conference Pub Date : 1997-09-22 DOI:10.1109/ESSDERC.1997.194498
A. Scarpa, P. Ries, G. Ghibaudo, A. Paccagnella, G. Pananakakis, J. Brini, G. Ghidini, C. Papadas
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引用次数: 8
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应力诱发泄漏电流依赖于氧化物厚度、工艺和应力水平
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27th European Solid-State Device Research Conference
27th European Solid-State Device Research Conference
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