{"title":"MEMSTECH 2022 Cover Page","authors":"","doi":"10.1109/memstech55132.2022.10002915","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":348465,"journal":{"name":"2022 IEEE XVIII International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-09-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE XVIII International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/memstech55132.2022.10002915","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}