(Ba, Sr)(Ti, Mn)O3 Perovskite Films for Co-Planar Waveguide Tunable Microwave Phase Shifters

Xingli He, Ioanna Bakaimi, Nur Zatil Ismah Hashim, Yudong Wang, A. Mostaed, I. Reaney, Q. Luo, S. Gao, B. Hayden, C. H. (Kees) de Groot
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引用次数: 2

Abstract

BaxSr1-xTiyMn1-yO3 BSTO thin films have been synthesized using a molecular beam epitaxy system. Novel coplanar waveguide tunable phase shifters have been developed using these Mn-doped perovskite films. The presented phase shifters operate with a phase shift angle of 12 degrees at 10GHz. at an applied bias of 10V on an area smaller than 1mm2, Insertion loss of ~3.2 dB is extracted from the S-parameter measurement. Small changes of composition lead to a significant variation of device phase shift, demonstrating the importance of synthesizing suitable structure BSTO film.
共面波导可调谐微波移相器用(Ba, Sr)(Ti, Mn)O3钙钛矿薄膜
利用分子束外延系统合成了BaxSr1-xTiyMn1-yO3 BSTO薄膜。利用这些掺杂锰的钙钛矿薄膜研制出了新型的共面波导可调谐移相器。所设计的移相器在10GHz工作时的移相角为12度。在小于1mm2的面积上施加10V偏置时,从s参数测量中提取出~3.2 dB的插入损耗。组成的微小变化会导致器件相移的显著变化,这表明合成合适结构的BSTO薄膜的重要性。
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