W. Filipowski, Z. Pruszowski, K. Waczyński, Natalia Waczyńska-Niemiec, A. Czerwiński, M. Pluska, J. Kulawik
{"title":"Influence of ammonium tungstate additive in metallization baths on Ni-Cu-P resistive layer properties","authors":"W. Filipowski, Z. Pruszowski, K. Waczyński, Natalia Waczyńska-Niemiec, A. Czerwiński, M. Pluska, J. Kulawik","doi":"10.23919/EMPC.2017.8346916","DOIUrl":null,"url":null,"abstract":"The paper concerns research on the impact of ammonium tungstate additive in metallization baths on chemical properties of thin Ni-Cu-P resistive layers produced by means of chemical metallization. Material properties were modified by forming a Ni-Cu-P layer in the presence of tungsten ions. Layers obtained in this manner were examined for possibility of application in production of precision film resistors with a near 0 [ppm/K] temperature coefficient of resistance (TCR). The influence of time of ammonium tungstate introduction into a metallization bath on the Ni-Cu-P resistive layer deposition process has been examined and analyzed.","PeriodicalId":329807,"journal":{"name":"2017 21st European Microelectronics and Packaging Conference (EMPC) & Exhibition","volume":"131 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 21st European Microelectronics and Packaging Conference (EMPC) & Exhibition","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/EMPC.2017.8346916","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The paper concerns research on the impact of ammonium tungstate additive in metallization baths on chemical properties of thin Ni-Cu-P resistive layers produced by means of chemical metallization. Material properties were modified by forming a Ni-Cu-P layer in the presence of tungsten ions. Layers obtained in this manner were examined for possibility of application in production of precision film resistors with a near 0 [ppm/K] temperature coefficient of resistance (TCR). The influence of time of ammonium tungstate introduction into a metallization bath on the Ni-Cu-P resistive layer deposition process has been examined and analyzed.