Low-loss LIGA-fabricated coplanar waveguide and filter

Abstract

A low-loss LIGA-fabricated conductor- backed coplanar waveguide and filter are presented. The copper transmission lines are 517 mum thick and are fabricated directly on quartz in a uniplanar X- ray lithography process. The conductor-backed CPW achieves a measured attenuation of 0.090 dB/cm at 18 GHz with low dispersion over the bandwidth of interest. A bandpass filter is realized using the thick-metal CPW with with two shorted quarter-wave resonators, which provide a passband between 6 and 11 GHz and a loss of -1 dB at 8.5 GHz.