Gas sensor using high-frequency quartz crystal microbalance

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218) Pub Date : 2001-06-06 DOI:10.1109/FREQ.2001.956274

S. Kurosawa, Dae-Sang Han, Jong-Won Park, H. Aizawa, Minoru Yoshimoto, Chikashi Nakamura, Jun Miyake, Sang‐Mok Chang

引用次数: 11

Abstract

Fundamental modes (9 & 50 MHz) and overtone modes of 3rd mode of 33 MHz (100(3) MHz) and 5th mode of 20 MHz (100(5) MHz) of quartz crystal microbalances. (QCMs) with high frequencies are studied to increase the frequency response of QCM gas-sensor. On the fundamental and overtone modes, the ratio of mass sensitivity of QCMs calculated from theory is consistent with that of the experimental results.

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气体传感器采用高频石英晶体微天平

石英晶体微天平的基本模式(9和50 MHz)和泛音模式的第3模式33 MHz (100(3) MHz)和第5模式20 MHz (100(5) MHz)。为了提高QCM气体传感器的频率响应，研究了高频率的QCM气体传感器。在基模和泛音模上，理论计算的质量灵敏度比与实验结果基本一致。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)

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