Silane glow discharge based double antireflection coatings for cr-Si solar cells

Abstract

Double-layer antireflection coatings composed of hydrogenated amorphous silicon carbide and oxide have been prepared by silane glow discharge. Superior optical properties are observed on cr-Si as compared to single-layer plasma nitride coatings. When applied to cr-Si solar cell structure a relative increase in both short circuit current and efficiency of 2.8% was observed.<>