Impact of High-Energy Proton Irradiation on MoS2 Films and Its Field Effect Transistors

Huiping Zhu, Lei Wang, Jingyuan Shi, Xin-nan Huang, Z. Zheng, Guodong Xiong, Bo Li, Q. Gao, Bin Yang, Jiajun Luo, Zhengsheng Han, Xinyu Liu
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Abstract

Sulfur vacancies introduced by proton irradiation in the MoS2 film cause the multilayer MoS2 to be decoupled, resulting in a indirect-to-direct bandgap transition. Unlike the irradiation-introduced interface states, sulfur vacancies can improve the performance of MoS2 FET devices.
高能质子辐照对MoS2薄膜及其场效应晶体管的影响
质子辐照在MoS2薄膜中引入的硫空位导致多层MoS2去耦,导致间接到直接的带隙跃迁。与辐照引入的界面态不同,硫空位可以改善MoS2 FET器件的性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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