Influence of Cu underlayer on the high-frequency magnetic properties of FeCoSiO thin films

2015 IEEE Magnetics Conference (INTERMAG) Pub Date : 2015-06-01 DOI:10.1109/INTMAG.2015.7156980

G. Lu, X. Miao, W. Cheng, X. Huang, L. Yang, L. Pan

引用次数: 4

Abstract

A series of soft magnetic FeCoSiO films were fabricated on Si (100) substrates using Cu as underlayer by radio frequency magnetron sputtering. The influence of Cu underlayers on the dynamic magnetic properties of as-sputtered FeCoSiO thin films were studied in details.

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Cu衬底对FeCoSiO薄膜高频磁性能的影响

采用射频磁控溅射技术，以Cu为衬底，在Si(100)衬底上制备了一系列软磁FeCoSiO薄膜。研究了Cu衬底对溅射FeCoSiO薄膜动态磁性能的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2015 IEEE Magnetics Conference (INTERMAG)

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