Modeling of Threading Dislocation Density Reduction in AlN/Al2O3 Porous Heterostructure

Abstract

We analyze the possibility for reducing the density of threading dislocations (TDs) in a porous AlN films exploring numerical calculations of thermoelastic stresses and the reaction-kinetic model of dislocation interactions. We study the distributions of the normal and shear components of the thermoelastic stress tensor in AlN film with triangular pores grown on Al2O3 substrate. We find the pore parameters that affect the decrease in the TD density in the AlN film. We compare the results of theoretical calculations with experimental data on TD density reduction in porous AlN/Al2O3 heterostructures.