Laser applications in the field of MEMS

Abstract

The paper overviews some of the most important applications of lasers in the field of microsystems (MEMS). We present applications from both technology and MEMS testing. Since these applications cover a wide range, the presentation does not aim to offer a thorough, detailed presentation of each of these, but only to underline some of the most important directions and features. We present the respective applications, their working principles, their advantages and their drawbacks. In some cases we present examples of microstructures realized by using laser techniques.