Fabrication of graphene field-effect transistors by simple stripping from CVD-grown layers

J. Hwang, Jaehee Lee, Jong-Cheol Lee, D. Whang, S. Hwang
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引用次数: 2

Abstract

We develop a simple technique to fabricate graphene field-effect-transistor (FET) devices. Our technique is stripping graphene by scotch tape from the chemical vapor deposition (CVD)-grown layer, except the gap region between the source and drain electrode. The current-voltage (I–V) characteristic of a graphene FET before stripping shows a large zero-bias conductance of 6.5 mS and no gate operation. After stripping, the zero gate bias conductance of the device is reduced to 23 µS and a clear gate operation is observed. The change of FET characteristics before and after stripping is due to the formation of a urn size graphene flake. There is large potential that this one-step stripping technique can be extended to a more controllable method to fabricate graphene FET devices.
从cvd生长层中简单剥离制备石墨烯场效应晶体管
我们开发了一种简单的技术来制造石墨烯场效应晶体管(FET)器件。我们的技术是用透明胶带从化学气相沉积(CVD)生长层中剥离石墨烯,除了源极和漏极之间的间隙区域。剥离前石墨烯FET的电流-电压(I-V)特性显示出6.5 mS的大零偏导和无栅极操作。剥离后,器件的零栅极偏置电导降至23µS,栅极工作清晰。剥离前后FET特性的变化是由于形成瓮大小的石墨烯薄片。这种一步剥离技术有很大的潜力可以扩展为一种更可控的方法来制造石墨烯场效应晶体管器件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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