Optimization of parametric yield

[Proceedings] 1991 International Workshop on Defect and Fault Tolerance on VLSI Systems Pub Date : 1900-01-01 DOI:10.1109/DFTVS.1991.199938

S. W. Director

引用次数: 3

Abstract

Yield loss can be characterized as either catastrophic or parametric. Catastrophic yield loss is primarily do to local, or spot, defects that occur in a manufacturing process. On the other hand, parametric yield loss is due to global disturbances, such as mask misalignment. In this paper the author explores these two different types of yield loss and then reviews some methods that have been developed to maximize parametric yield.<>

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参数产量优化

产量损失可以表现为灾难性损失或参数损失。灾难性的产量损失主要是由生产过程中出现的局部缺陷造成的。另一方面，参数良率损失是由于全局扰动，如掩模不对准。在本文中，作者探讨了这两种不同类型的产量损失，然后回顾了一些已经开发的最大化参数产量的方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

[Proceedings] 1991 International Workshop on Defect and Fault Tolerance on VLSI Systems

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