Electron Backscatter Diffraction

Abstract

Electron backscatter diffraction (EBSD) is a scanning electron microscope (SEM) based technique that is used to obtain local information on the crystallographic character of bulk crystalline and polycrystalline materials. Topics discussed in this article include: EBSD system overview, multiphase analysis, and application to aluminum integrated circuit interconnects, dislocation structure analysis, analysis of grain boundary networks, and application to friction stir welding of aluminum alloys.