Imaging and Diffraction with a Programmable Pixelated Detector

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Abstract

This chapter discusses the setup and use of a transmission electron detector in a typical scanning electron microscope (SEM). It describes the arrangement and function of the primary components in the detector, following the signal path from the sample to a micromirror array where it is directed by the user to either a CMOS sensor (to record diffraction patterns) or a photomultiplier tube (to observe real-space images). The chapter discusses some of the nuances of digital imaging and diffraction and includes examples in which transmission electron detectors are used to analyze gold films, carbon nanotubes, zeolite sheets, and monolayer graphene. It also describes emerging techniques, including four-dimensional STEM, thermal diffuse scattering, energy filtering, aberration correction, and atomic resolution imaging.
可编程像素化探测器的成像和衍射
本章讨论了典型扫描电子显微镜(SEM)中透射电子探测器的设置和使用。它描述了探测器中主要组件的排列和功能,沿着从样品到微镜阵列的信号路径,由用户引导到CMOS传感器(记录衍射图案)或光电倍增管(观察实际空间图像)。本章讨论了数字成像和衍射的一些细微差别,并包括使用透射电子探测器分析金膜、碳纳米管、沸石片和单层石墨烯的例子。它还描述了新兴技术,包括四维STEM,热漫射散射,能量滤波,像差校正和原子分辨率成像。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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