Study the Effect of Pd Sensitization on Hydrogen and Methane Sensing Performances of Sol-Gel Grown Nano WO3/SiO2/Si Sensor

Abstract

The sensing performance of Pd sensitized WO3 thin film gas sensor has been studied towards hydrogen and methane gases with different concentrations (0.1%, 0.5%, 1%) at the optimum operating temperatures. The Pd surface sensitized Tungsten trioxide (WO3) thin film sensor has been prepared on SiO2/Si substrate by sol-gel deposition technique. The material properties of the thin film sensor have been analyzed by two different techniques (X-ray diffraction (XRD) and Scanning Electron Microscopy (SEM)). The Stability of Pd surface sensitized WO3 thin film hydrogen sensor have also been studied. The Pd surface sensitized WO3 hydrogen sensor presents better results in terms of operating temperature, response magnitude compared to Pd surface sensitized WO3 thin film-based methane senso