Robust adaptive control of piezo-actuated positioning stages with an ellipse-based hysteresis model

Guoying Gu, Limin Zhu, C. Su
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引用次数: 0

Abstract

Piezo-actuated positioning stages are widely applied in many industrial applications for nanometer or sub-nanometer displacement resolution. However, the non-smooth hysteresis nonlinearity inherent to the piezoelectric material usually degrades the tracking performance of the controlled system. The challenge is that there is no general method to design control laws with general hysteresis models. The control algorithms are always developed based on a specific hysteresis model. In this paper, an ellipse-based hysteresis model is used to describe the hysteresis behaviors observed on the piezo-actuated positioning stages. The benefit for such a model lies on the fact that the expressions of the model are completely analytical and can be determined easily by a set of parameters. It is therefore convenient to fuse this model with the available robust control approach to mitigate the effects of hysteresis. To illustrate this advantage, a discontinue-projection-based robust adaptive controller is specifically designed, which guarantees the global stability of the closed control system and achieves excellent tracking performance within a desired precision. Simulation performed on a piezo-actuated positioning stage validates the effectiveness of the developed control approach.
基于椭圆滞后模型的压电驱动定位平台鲁棒自适应控制
压电驱动定位平台广泛应用于纳米或亚纳米位移分辨率的工业应用中。然而,压电材料固有的非光滑磁滞非线性通常会降低被控系统的跟踪性能。挑战在于没有一般的方法来设计具有一般滞后模型的控制律。控制算法通常是基于特定的滞后模型开发的。本文采用基于椭圆的磁滞模型来描述压电驱动定位平台的磁滞特性。这种模型的好处在于,模型的表达式是完全解析的,可以很容易地通过一组参数确定。因此,可以方便地将该模型与现有的鲁棒控制方法融合,以减轻磁滞的影响。为了说明这一优点,设计了一种基于不连续投影的鲁棒自适应控制器,保证了封闭控制系统的全局稳定性,并在期望的精度范围内实现了良好的跟踪性能。在压电驱动定位平台上进行的仿真验证了所提出的控制方法的有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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