New process for screen cutting: water-jet guided laser

D. Perrottet, S. Amorosi, B. Richerzhagen
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引用次数: 4

Abstract

Today's OLED manufacturers need high-precision, fast tools to cut the metal screens used to deposit the electroluminescent layers onto the substrate. Conventional methods -tching and dry laser cutting - are not satisfying regarding the demands of high-definition OLED displays. A new micro machining technology, the water jet guided laser - a hybrid of laser and water jet technologies that has been actively used in recent years in the electronic and semiconductor field - is now available to OLED manufacturers. This technology represents a significant improvement in screen, mask and stencil cutting, as it combines high precision and high speed. It is able to cut small apertures with totally clean edges (no dross or slag), as the water jet removes the particles and a thin water film is maintained on the material surface during the process. Because the water jet cools the material between the laser pulses, the cut material is free of any thermal stress. The water jet guided laser is also a very fast process: as an example, rectangular slots can be cut in 30 to 50 microns thick stainless steel or nickel at a rate between 25'000 and 30'000 holes per hour.
筛网切割新工艺:水射流引导激光
今天的OLED制造商需要高精度、快速的工具来切割用于将电致发光层沉积到基板上的金属屏幕。传统的方法——拼接和干式激光切割——不能满足高清晰度OLED显示器的要求。水射流引导激光是一种新的微加工技术,是激光和水射流技术的混合,近年来在电子和半导体领域得到了积极的应用,现在OLED制造商可以使用。该技术结合了高精度和高速度,代表了丝网,掩模和模板切割的显着改进。它能够切割边缘完全清洁的小孔(没有渣滓或渣),因为水射流去除颗粒并在过程中在材料表面保持薄水膜。由于水射流在激光脉冲之间冷却材料,因此切割的材料没有任何热应力。水射流引导激光也是一个非常快速的过程:例如,矩形槽可以在30到50微米厚的不锈钢或镍上切割,速度在每小时25000到30000个孔之间。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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