Preparation, Characterization and Gas Sensing Performance of Pure SnO2 Thin Films Deposited using Physical Vapour Deposition Technique

Abstract

Nanocrystalline SnO 2 thin films were successfully prepared using Physical Vapour Deposition technique and were annealed at 400 o C. Structural, morphological, elemental, compositional, optical, and electrical and gas sensing properties were studied using XRD, FESEM, EDXS, UV-Vis Spectrophotometer, DC resistance measurement method respectively. Acetone, Cl 2 , CO 2 , Ethanol, H 2 S and NH 3 sensing performance of Nanocrystalline physically vaporized SnO 2 thin films were investigated and reported in this paper. The results were systematically tabulated, interpreted and discussed.