Quantitative yield and reliability projection from antenna test results-a case study

Abstract

To monitor plasma charging damage, it is common to use extremely large antenna ratio (AR) testers to improve sensitivity. Calculating how the measured damage to these large AR testers impacts product is a serious issue that has not yet been resolved. Without the ability to predict the damage impact to product, and hence to quantitatively establish antenna design rules, the only way to ensure product reliability is to reduce damage as best we can and to use tight design rules. Such practice is extremely costly and provides no assurance. The purpose of this paper is to illustrate a quantitative methodology to deal with the above-mentioned problem using a real example.