Design and Analysis of MEMS Varactor

Abstract

We report the design and analysis of tunable MEMS varactor based on a parallel plate structure using electrostatic actuation. The device is simulated for increasing tuning range to achieving high Q value and explore its application for large range of frequencies. The response of the tunable capacitor has been analyzed for Aluminum, nickel, copper and gold materials with different mechanical suspension. The varactor is designed for the application in GHz frequency range. Pull in voltage, tuning range and the capacitance change with applied voltage between the plates of the varactor structure has been investigated. The simulation has been carried out using COMSOL Multiphysics finite element modeling tool.