GaInAsP/SOI hybrid laser with AlInAs-oxide confinement structure fabricated by plasma activated bonding

Abstract

We realized GaInAsP/SOI hybrid Fabry-Pérot (FP) laser with AlInAs-oxide current confinement structure for PICs on a silicon platform. Using hybrid wafers by a plasma activated bonding technique, an AlInAs layer just above GaInAsP quantum wells was oxidized by wet oxidation. A threshold current of 50 mA and an external differential quantum efficiency of 11%/facet were obtained with the unoxidezed stripe width of 4.5 μm and the cavity length of 500 μm.