Universal algorithm for scanning probe microscopy images grain analysis of objects on the surface

Abstract

Currently, scanning probe microscopy (SPM) is actively used to obtain surface data. A large number of images require a fast and high-accuracy calculation of the topographic parameters of particles on the surface. The original grain analysis algorithm based on finding a local maximum is realized by sorting an array of points forming the topography of the SPM image surface. It provides to determine various topographic characteristics of objects located on a surface (height, lateral dimensions, area, volume, etc.)