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INFLUENCE OF THE PARAMETERS OF THE PROCESS OF ELECTRON-BEAM DEPOSITION ON THE OPTICAL PARAMETERS OF SILICON DIOXIDE FILMS

University News. North-Caucasian Region. Technical Sciences Series Pub Date : 2022-12-01 DOI:10.17213/1560-3644-2022-4-85-89
Liudmila Zhikina
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University News. North-Caucasian Region. Technical Sciences Series
University News. North-Caucasian Region. Technical Sciences Series
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