Engineering data analysis using Discovery [semiconductor manufacture]

Abstract

The ability to rapidly turn data into information is a necessity in the semiconductor industry. Furthermore, the ability to analyze and correlate yield results to electrical test results and in-process data is essential in the overall yield enhancement effort. The need exists to have a centralized database to store all aspects of engineering data, and analysis tools that will communicate with the database. KLA obtained the rights to Motorola's engineering database (Synergy) and analysis software (EDAS/sup TM/) and now markets it as Discovery/sup TM/. The Discovery system provides the capability of storing all probe results, in-process, equipment and SPC data, as well as bitmap and defect die level summary information. In addition, EDAS provides basic analytical software capabilities specifically for the semiconductor industry. MOS-13 and KLA partnered in the installation of Discovery into Motorola's newest fab, MOS-13. The goal was to implement an engineering database and analysis system to provide engineering with centralized access to needed data and analytical software that would assist them in their needs. Electrical test, and Probe bin, characterization, and bitmap die level summary data are currently being loaded into the Discovery database. The Discovery database, EDAS, and a newly created reporting tool have become an essential part of MOS-13.