Evaluation of crystallinity of SrS:Cu films for blue EL elements

M. Isai, Tomoyosi Horino, Y. Kurachi
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Abstract

SrS:Cu films were prepared by an electron beam deposition method to improve the emission properties of blue EL elements. SrS:Cu pellets were used as an evaporant of SrS:Cu films. The correlation between pellet-sintering condition and crystallinity of SrS:Cu films was investigated. As a result, it was found that the 2-hour pellet-sintering under 600°C was best to prepare superior SrS:Cu films. It was also found that the crystallinity of SrS:Cu films were greatly improved after 2-min rapid thermal annealing (RTA) process under 450°C.
蓝色EL元素的SrS:Cu薄膜结晶度评价
采用电子束沉积法制备了SrS:Cu薄膜,提高了蓝色EL元素的发射性能。采用SrS:Cu球团作为SrS:Cu薄膜的蒸发剂。研究了球团烧结条件与SrS:Cu薄膜结晶度的关系。结果表明,在600℃条件下2小时的球团烧结是制备优良SrS:Cu薄膜的最佳工艺。在450℃下经过2 min快速热退火(RTA)处理后,SrS:Cu薄膜的结晶度得到了很大的提高。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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