Design of a Novel Piezoelectric Stick-Slip Driving Nanopositioning Stage and Power Supply Circuit

Abstract

Nanopositioning stage is of central importance in the nanorobitic system. The working principle of piezoelectric stick-slip actuating combines the merits of piezoelectric actuating and stick-slip actuating and is a preferable option to design nanopositioning stage with the advantage of high resolution, large stoke and compact mechanical structure. However, the existing techniques in the design of piezoelectric stick-slip driving nanopositioning stage paid little attention to the adjustable friction force which significantly affects the motion properties and load capability. Our goal was to develop a novel piezoelectric stick-slip driving nanopositioning stage that the friction force can be adjusted, consequently, the properties of high resolution, high speed and large load are ensure. To do this we developed an independent driving module including piezoelectric stack actuator, flexure hinge, driving object and preloading screw that installed between base and slider, and the friction force is adjusted by operating adjusting screw installed in the base. Moreover, a power supply circuit of nanopositiong stage was designed and the impact of output voltage magnitude, frequency and step time on the motion of nanopositioning stage was analyzed in order to design the more precise control signal.