Experimental evaluation of parameters of the capacitive MEMS converters

Abstract

Parameters of the capacitive mechanical-to-electrical energy MEMS converters are investigated experimentally. A comparison of the theoretical calculations performed using simplified models as well as experimental data is carried out. The analysis shows that existing differences between calculated and experimental data are probably related to the additional factors, e.g. parasitic capacity, which arise during measurements and are not taken into considerations in the simplified models.