Fabrication of Bi4Ti3O12 Thin Films Using Alcohol Related Solutions by Micro Liquid Delivery Systems

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI:10.1109/ISAF.2007.4393190

M. Yamaguchi, A. Yamamoto, Y. Masuda

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Abstract

We fabricate the bismut titanate (Bi₄Ti₃O₁₂) thin films used an alcohol related solutions which dissolved Bi(OtC₅H₁₁)₃ and Ti[OCH(CH₃)₂]₄ in C₂H₅OC₂H₄OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6 muC/cm² and 36 kV/cm, respectively, and shows fatigue properties up to 108 times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.

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微液体输送系统中酒精相关溶液制备Bi4Ti3O12薄膜

采用酒精相关溶液将Bi(OtC5H11)3和Ti[OCH(CH3)2]4溶解于C2H5OC2H4OH中，制备钛酸铋(Bi4Ti3O12)薄膜，用于喷墨打印等微液体输送系统。这些薄膜在750摄氏度的纯氧(含1.2%的臭氧)气氛中烧制，呈现出片状晶粒，具有高度的c轴取向。薄膜具有良好的铁电性能，残余极化和矫顽力场分别为2.6 μ c /cm2和36 kV/cm，具有高达108倍的疲劳性能。此外，我们研究了微液体输送系统亲水处理后Pt衬底上的图案形成。在亲水性处理的基材表面绘制的图案显示出相对平坦的横截面结构。因此，我们认为微液体输送系统和基材表面的亲水性处理是有效的薄膜形成。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

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