MOEMS gyroscope based on acoustooptic mode coupling

Asia Communications and Photonics Conference and Exhibition Pub Date : 2010-12-08 DOI:10.1117/12.888635

Shu-xiang Lu, Shufen Chen, Yi Zhao

引用次数: 2

Abstract

A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg⁻¹s⁻¹ in the angular rate range of 0 –400deg/s.

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基于声光模式耦合的MOEMS陀螺仪

设计了一种新型的微机电陀螺结构。将光波导、衍射元件、电光调制器和表面声波传感器等集成在XY LiNbO3衬底上。在0 -400deg /s的角速率范围内，灵敏度为12 uVdeg−1s−1。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Asia Communications and Photonics Conference and Exhibition

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