Tribological properties study of MoS2 coatings deposited by MoS2 target magnetron sputtering under various modes

Abstract

The article is devoted to the study of the process various modes influence on the tribological characteristics of the thin-film solid lubricant MoS2-coatings deposited by the MoS2-target magnetron sputtering in an argon medium. Temperature and bias voltage on the substrate, as well as the coating thickness influence on the coatings coefficient of friction and the wear life is shown.