A 180-nm CMOS time-of-flight 3-D image sensor

Abstract

We report on the design and the experimental characterization of a new 3-D image sensor, based on a new 120-nm CMOS-compatible photo-detector, which features an internal demodulation mechanism effective up to high frequencies. The distance range covered by our proof-of-concept device spans from 1-m to a few meter, and the resolution is about 1-cm.