Automatic Labeling in Image Segmentation and Classification for TFT-LCD Manufacturing

Chang Liu, S. Vaassen, Lakshmi Manoj, Xiaojie Zhan, C. Xu, Someshwar Rudra Ajay, Ziyue Lu, Max Wittstamm, Sa. Jain, Chao Zhang, Benny Drescher
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Abstract

Product quality inspection of Thin-film transistor-liquid crystal display (TFT-LCD) is time-consuming and labor-intensive. An automatic algorithm-based defect inspection system solves these problems by reducing the time and manual labor involved. This research work proposes an AI-based LCD inspection vision system that evaluates defects by AI-based defect segmentation and classification. Time-consuming pixel-level labeling of defects can be eliminated by applying weakly-supervised learning methods. The efforts of quality control personnel for model training can be reduced which is especially important in high-mix production with a high amount of changeovers and production process adjustments. Therefore, PP-CAM (Precise-Puzzle-CAM) based defect segmentation method is proposed to cope with diverse TFT-LCD defect shapes and sizes. Secondly, a region of interest-supported classification method is developed to enable cropping of small-scale TFT-LCD. The performance of the AI methods are investigated using industrial TFT-LCD manufacturing datasets of two manufacturing processes.
TFT-LCD制造中图像分割与分类的自动标注
薄膜晶体管-液晶显示器(TFT-LCD)的产品质量检验费时费力。一个基于自动算法的缺陷检测系统通过减少时间和人工劳动来解决这些问题。本研究提出了一种基于人工智能的LCD检测视觉系统,该系统采用基于人工智能的缺陷分割与分类对缺陷进行评估。采用弱监督学习方法可以消除耗时的像素级缺陷标记。可以减少质量控制人员对模型进行培训的工作量,这对于高混合生产,大量转换和生产工艺调整尤其重要。为此,提出了基于PP-CAM (precision - puzzle - cam)的缺陷分割方法,以应对不同形状和尺寸的TFT-LCD缺陷。其次,提出了一种兴趣支持区域分类方法,实现了小尺度TFT-LCD的裁剪。利用两种制造工艺的工业TFT-LCD制造数据集研究了人工智能方法的性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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