Simplified optical coupling and alignment scheme for cost effective 10 Gbit/s TOSA modules based on edge emitters hermetically packaged in micro-machined silicon structures

M. Winter, R. Hauffe, A. Kilian
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引用次数: 5

Abstract

Packaging of opto-electronic components - as opposed to semiconductor or electronics ICs - requires not only hermeticity but also proper alignment of optical elements. Due to tolerances in the range of a few microns at best, conventional technology usually requires laborious active alignment steps to couple light efficiently into the fiber. A simple optical coupling and alignment scheme is presented which enables the fabrication of cost effective 10 Gbit/s TOSA (transmitter optical sub-assembly) modules which are based on edge-emitting laser diodes packaged hermetically in micro-machined silicon structures.
基于边缘发射器密封封装在微加工硅结构中的低成本10gbit /s TOSA模块的简化光耦合和对准方案
光电元件的封装-与半导体或电子集成电路相反-不仅需要密封性,而且需要光学元件的适当对准。由于误差最多在几微米的范围内,传统技术通常需要费力的主动对准步骤来将光有效地耦合到光纤中。提出了一种简单的光学耦合和对准方案,该方案能够制造出基于边缘发射激光二极管密封封装在微加工硅结构中的具有成本效益的10 Gbit/s TOSA(发射器光学子组件)模块。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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