Piezoelectric thin film deposition: Self-assembled island structures and low temperature processing

Abstract

New deposition regimes for strontium-doped lead zirconate titanate (PSZT) piezoelectric thin films on silicon substrates are outlined in this work. Optimised conditions have enabled the demonstration of an intermetallic reaction driven self-assembly process for formation of islands of piezoelectric and the use of lattice guiding by a metal layer to perform low temperature deposition of piezoelectric thin films.