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Decreasing in stiction force between two electrodes in vibration energy harvester by nano-dots array on SiO2 electret

The Proceedings of the Symposium on Micro-Nano Science and Technology Pub Date : 1900-01-01 DOI:10.1299/jsmemnm.2019.10.20pm3pn330
Y. Onishi, M. Suzuki, T. Takahashi, S. Aoyagi
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二氧化硅驻极体纳米点阵列降低振动能量收集器两电极间的粘性
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The Proceedings of the Symposium on Micro-Nano Science and Technology
The Proceedings of the Symposium on Micro-Nano Science and Technology
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