Interactive Modelling and Simulation of Micromirror MEMS Devices

Abstract

This paper presents an interactive software package for the modelling and simulation of microelectromechanical system (MEMS) devices utilizing the MATLAB high-level programming language and its interactive environment. The package provides a dynamic analysis and frequency responses of a 1-D torsional micromirror electrostatically actuated with staggered vertical comb-drives. Applying a frequency sweep to the micromirror equation, the torsional mode natural frequency may be estimated. The developed package consists of several graphical user interfaces used for modeling MEMS devices. The software package is useful for computing the forces and torques for different micromirror geometries.