Three-axis Piezoresistive Accelerometer with Uniform Axial Sensitivities

Abstract

A three-axis piezoresistive accelerometer which has uniform sensitivities to three axes was developed using Micro Electro Mechanical Systems (MEMS) technology. This sensor which is made of a heavy proof mass and four long beams allow us to obtain high sensitivities by reducing the resonant frequencies. Uniform axial sensitivities with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.