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Low-temperature processing of ferroelectric thin films on Si substrates

Nanostructures in Ferroelectric Films for Energy Applications Pub Date : 1900-01-01 DOI:10.1016/B978-0-12-813856-4.00007-7
Z. Wang, J. Ouyang
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Si衬底铁电薄膜的低温加工
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Nanostructures in Ferroelectric Films for Energy Applications
Nanostructures in Ferroelectric Films for Energy Applications
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