Alin Panca, A. Serb, S. Stathopoulos, S. K. Garlapati, T. Prodromakis
{"title":"Automated RRAM measurements using a semi-automated probe station and ArC ONE interface","authors":"Alin Panca, A. Serb, S. Stathopoulos, S. K. Garlapati, T. Prodromakis","doi":"10.1109/ICMTS55420.2023.10094156","DOIUrl":null,"url":null,"abstract":"Resistive Random Access Technology (RRAM) is quickly reaching industrial maturity. A key element towards achieving lasting commercial success, however, is automated testing; useful for performance benchmarking and rapid prototyping of new flavours of technology. Here we present a wafer-scale semi-automated RRAM device testing platform.","PeriodicalId":275144,"journal":{"name":"2023 35th International Conference on Microelectronic Test Structure (ICMTS)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 35th International Conference on Microelectronic Test Structure (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS55420.2023.10094156","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Resistive Random Access Technology (RRAM) is quickly reaching industrial maturity. A key element towards achieving lasting commercial success, however, is automated testing; useful for performance benchmarking and rapid prototyping of new flavours of technology. Here we present a wafer-scale semi-automated RRAM device testing platform.