Optimization of MEMS Gyro Electrode Configuration and Laws of Voltage Formation

Abstract

This report analyzes foreign and domestic methods for improving robustness (accuracy in harsh environment) of MEMS gyros and considers improvement of the MEMS gyro developed by the CSRI Elektropribor owing to optimization of the gyro electrode structure and laws of voltage distribution. Gyro sensitivity to harsh environment conditions is discussed. The authors propose the criteria for changing the existing electrode structure and substantiate its choice and the electrode dimensions.