Analysis of the cavity geometric effect of liquid-phase epitaxy process

Abstract

The slider-induced convection of the confined melt cavity in liquid phase epitaxy is calculated by the finite element method. The steady state flux distribution within the melt cavity is analyzed, and the relative momentum transfer on the poly-GaAs melt is calculated for several kinds of cavity height and shape. It is found that the amount of momentum tranfer is related to the cavity height and the skew angle of the cavity, which could change initial growth rate in thin layer device manufacturing.<>